
Hot
plates with
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vacuum chucks
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gas-tight covers for nitrogen or vacuum
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lift pins for contact or proximity baking
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heat-cool feature
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Vacuum Chuck hot plates
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Wenesco's
hot vacuum chuck utilizes high uniformity
heaters controlled with an accurate digital thermostat to assure
even heating across the entire plate. The substrate is secured
to the plate surface when air is suctioned out of the vacuum
chuck. The temperature sensor, imbedded in the vacuum chuck,
monitors and maintains the selected temperature, thus
controlling the cure rate of fluid materials deposited on the
substrate.
A hot vacuum chuck system may also include provisions for
cooling the substrate after hardening, by shutting down the heat
and directing a cooling gas flow towards the emulsion. This
process integrates both the hardening and cooling operations and
improves product throughput.
Other applications include probing, characterization, inspection
and failure analysis of semiconductor wafers and chips,
surface annealing, metal disposition, baking, and other
material research.
The standard sizes of hot vacuum chucks range from 15mm to 600mm
. Temperature ranges for standard models are available to 537C,
with higher temperature limits available for custom hot chucks.
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Model
HP66V hot plate with PV4 vacuum chuck
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Model HP1212QPV3
hot plate, with four independent PV3 plate
styles. This feature is available
with any plate style for chucks up to 24 x 24 in. |

Model HP99V shown with optional
pneumatic lift pins. The` pins can be
actuated manually, or programmed using a time or temperature base.
Lift pins are further explained near the bottom of this page
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VACUUM CHUCK HOT PLATES
These
versatile heated chucks provide a means for a simple, yet highly
controllable heat process for processing substrates. All
models feature a remote digital thermostat, which may be placed up to 32
in. from the plate. Set point and current temperature are digitally
displayed in C or F, and temperature is held constant within 1% of set
point.
This thermostat may be programmed in a wide range of ramp and soak
profiles. An optional com port allows you to communicate with the
thermostat from your computer
An on-off valve is furnished for your vacuum supply. Vacuum rings and
port are easily enabled or disabled with recessed set screws. |
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Model |
Plate size (in) |
Overall size (in) |
Vacuum rings |
Plate surface.
005 |
Max temp (C) |
power
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HP66V |
6 X 6
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8 X 8 X 2
high |
pv3 or pv4 |
aluminum |
400 |
120/240
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HP99V |
9 x 9 |
11 x 11 x
2 |
pv3 or pv4 |
aluminum |
400 |
120/240
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HP1212V |
12 x 12 |
14 x 14 x
2 |
select |
aluminum |
400 |
120/240 |
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HP1818V |
18 X 18 |
20 x 20 x
2 |
select |
aluminum |
400 |
120/240
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HP2424V |
24 X 24 |
26 x 26 x
2 |
select |
aluminum |
400 |
240 |
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HP66HV |
6 x 6 |
10 x 10 x
4 |
pv3 or pv4 |
stainless
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537 |
120/240 |
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HP99HV |
9 x 9 |
13x 13 x 4 |
pv3 or pv4 |
Stainless
303 |
537 |
240 |
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HP1212HV |
12 x 12 |
16 x 16 x
4 |
select |
Stainless
303 |
537 |
240 |
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HP1818HV |
18 x18 |
22 x 22 x
4 |
select |
Stainless
303 |
537 |
240 |
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HP2424HV |
24 x 24 |
28 x 28 x
4 |
select |
Stainless
303 |
537 |
240 |
Notes: Heat rise: V models, approx
20C/minute. HV models approx 25C/minute.
Vacuum rings -- select
from chart below or we will customize to your requirements.
Other voltages available
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Plate style PV3 |

Plate style PV4 |

Plate style PV6 |
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Standard vacuum ring patterns |
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Plate PV3
Dia in / mm |
Plate PV4
Dia in / mm |
Plate PV6
Dia in / mm |
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.75 (19.05) |
.75 (19.05) |
75 (19..05) |
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1.75 (44.45) |
1.75 (44.45) |
1.75 (44.45) |
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3.75 (95.25) |
3.75 (95.25) |
3.75 (95.25) |
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5.75 (146.05) |
5.75 (146.05) |
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7.75 (196.85) |
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11.65 (295.91) |
Chucks with gas-tight hoods, for
nitrogen
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Model HP1212HV is shown with a gas tight
hood, fitted with a high temperature glass window. This fully
insulated hood is 4 in above the heated chuck.
The vented base shown under the heated chuck
housing contains a motorized lift pin assembly. Lift pin speed is
controlled up and down.
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Interior
view of motorized lift pin assembly.
This version is controlled with a computer.
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Temperature uniformity
for model HP 1212V |
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ZONE |
Zone size
inches |
Set pt
100C |
Set pt
200C |
Set pt
300C |
Set pt
400C |
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A |
2.4 x 2.4
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100 |
200 |
301 |
400 |
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B |
4.8 x 4.8 |
99 |
199 |
298 |
398 |
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C |
7.2 x 7.2 |
97 |
193 |
296 |
385 |
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D |
9.5 x 9.6 |
92 |
189 |
290 |
380 |
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E |
12 x 12 |
81 |
183 |
278 |
360 |
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This model has a tall gas-tight
hood with nitrogen gas entering from the top. Special perforated
metal filters spread the nitrogen flow evenly over the work piece.
Operations (Nitrogen flow on,off )( Heat on,off) (Hood up,down) ,
are controlled with a timer. The light tower displays activation
of these functions.
The polished stainless steel plate is 24x24 inches,
and operates at 450C |
Model HP66V, with nitrogen hood removed, is
shown with style pv3 vacuum pattern. The plumbing delivers and
retrieves coolant through tunnels machined in the chuck.
Chuck temperature is reduced from 300C to room
temperature in approximately 25-30 minutes.
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Wenesco
invites inquiries about customized hot plates in different sizes
or with special temperature requirements and features. Call or
write us today about your unique needs. |
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