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                 Vacuum Chuck hot plates
 

Our hot vacuum chuck utilizes high uniformity heaters controlled with an accurate digital thermostat to assure even heating across the entire plate. The substrate is secured to the plate surface when air is suctioned out of the vacuum chuck. The temperature sensor, imbedded in the vacuum chuck, monitors and maintains the selected temperature, thus controlling the cure rate of fluid materials deposited on the substrate. A hot vacuum chuck system may also include provisions for cooling the substrate after hardening, by shutting down the heat and directing a cooling gas flow towards the emulsion. This process integrates both the hardening and cooling operations and improves product throughput. Other applications include probing, characterization, inspection and failure analysis of semiconductor wafers and chips, surface annealing, metal disposition, baking, and other material research. The standard sizes of hot vacuum chucks range from 15mm to 600mm . Temperature ranges for standard models are available to 537C, with higher temperature limits available for custom hot chucks.

Model HP66V shown with PV1 plate

Model HP1212QPV3 hot plate, with four independent PV3  plate styles.  This feature is available with any plate style for chucks up to 24 x 24 in.

              
 VACUUM CHUCK HOT PLATES 

These versatile heated chucks provide a means for a simple, yet  highly controllable heat process for processing substrates.   All models feature a remote digital thermostat, which may be placed up to 32 in. from the plate. Set point and current temperature are digitally displayed in C or F, and temperature is held constant within 1% of set point. This thermostat may be programmed in a wide range of ramp and soak profiles.  An optional com port allows you to communicate with the thermostat from your computer An on-off valve is furnished for your vacuum supply. Vacuum rings and port are easily enabled or disabled with recessed set screws.

Model HP99V shown with optional pneumatic lift pins. The` pins can be actuated manually, or programmed using a time or temperature base. Lift pins are further explained near the bottom of this page

                              TEMPERATURE RANGE   0-325C (617F)  (chucks are anodized aluminum,.005” uniform surface)

Plates are available coated with silicon-ceramic or teflon, depending on operating temperature 

Model	Plate size	Overall size	Plate type	Power
HP66V	6 X 6 IN	8 x 8 x 2 in high	pv1 or pv3	120 or 240V
HP 99V	9 X 9 IN	11 x 11 x 2 in high	pv4	120 or 240V
HP1212V	12 X12 IN	14 x14 x 2 in high	pv6	120 or 240V
HP1818V	18 X 18 IN	20 X 20 X 2 in high	pv6	120 or 240V

                                                                    

 

 

TEMPERATURE RANGE   0-537C (1000F)   (chucks are 303 stainless steel -.005”uniform surface)
Temperature rise 20C to 537C=25 sec (20.68C/sec)

Model	Plate size	Overall size	Plate type	Power
HP66HV	6 X 6 IN	12 X 12 X 4 in high	pv1 or pv3	240V
HP99HV	9 X 9 IN	15 X 15 X 4 in high	pv4	240V
HP1212HV	12 X 12 IN	18 X 18 X 4 in high	pv6	240V
HP1818 HV	18 X 18 IN	20 X 20 X 4 in high	pv6	240V

 

Plate style PV1	Plate style PV3
Plate style PV4	Plate style PV6
	PV6 groove detail

 

Vacuum	Plate PV1 Dia in / mm	Plate PV3 Dia in / mm	Plate PV4 Dia in /  mm	Plate PV6 Dia in /  mm
Orfice	.125   (3.18)	.125   (3.18)	.125     (3.18)	.125     (3.18)
Ring	.	.75     (19.05)	.75     (19.05)	75     (19..05)
Ring		1.75   (44.45)	1.75   (44.45)	1.75   (44.45)
Ring		3.75   (95.25)	3.75   (95.25)	3.75   (95.25)
Ring			5.75   (146.05)	5.75    (146.05)
Ring				7.75    (196.85)
Ring				11.65    (295.91)

                                        VACUUM CHUCKS WITH NITROGEN HOOD

Model HP1212HNV shown with hood. Note the valves for directing the nitrogen in and out from under the hood. The third valve is used to supply vacuum to the plates.

Model HP1212HNV shown with PV6 style plate and new dual section hood.  The 2 sections of the hood consists of an insulated light weight lid and insulated side walls. If required, the side walls may be connected to the lid and used as a one piece hood The opaque insulated lid may be replaced with a transparent glass version.

Model HP1212HNV shown without hood

                                        TEMPERATURE RANGE   0-537C (1000F)   Chucks are stainless steel, .005" uniform surface.                                 

Model	Plate size	Overall size	Plate style	Power
HP66HNV	6 X 6 IN	14X 14  X 10 in high	pv1 or pv4	240V
HP99HNV	9 X 9 IN	25 X 25 X 10 in high	pv4"	240V
HP1212HNV	12 X 12 IN	25 X 25 X 10 in high	pv6	240V
HP1818 HNV	18 X 18 IN	20 X 20 X 4 in high	pv6	240V

Uniformity grid:  Models HP1212V, HP1212HV, HP1212HNV

Symbol Temperature  HP1212V   Temperature HP1212HV Temperature HP1212HNV   Inches from       center ●  502F (261C)   1004F(539C) 1004F(539C)         0 ○  500F (260C)   1002F(538C) 1002F(538C) .375 (9.5mm) □  498F (259C)   1000F(537C) 1000F(537C) .875 (22.2mm) ∆  496F (258C)   996F(535C) 996F(535C) 1.875 (47.62mm)  493F (256C)   989F(531C) 992F(532.6C) 2.875 (73mm)  490F (254C)   982F(527C) 989F(531C) 3.875 (98.5mm)  487F (253C)   973F(522C) 982F(527C) 5.825 (148mm)

Model HP1212HNV shown with your bell jar mounted on our platform. Note inert gas enters and exits the bell jar thru the valves in the platforms. The thermocouple, vacuum, and power connections are also furnished with the platform. These features negate the need for additional feed thru hardware for the bell jar.

Model HP1212HNV is shown with our optional lift pin mechanism, which raises the substrate up to .500 inch above the hot chuck. The pneumatic lift pin assembly is operated with a manually operated air valve, which operates a small compressed air cylinder. The lift pins are usually .125 inch diameter, and the pin location pattern may be specified.  A typical pattern is 4 pins, 90 degrees apart, 3 x 3 inch square.

We also have designed and built variations of  these hot plates, which include a “rapid cool” feature, whereby cold nitrogen may be introduced into channels in the chuck, decreasing the chuck temperature to room temperature in 10-20 minutes.

Wenesco invites inquiries about customized hot plates in different sizes or with special temperature requirements and features.  Call or write us today about your unique needs.

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