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                                           Hot plates  with

	vacuum chucks
	gas-tight covers for nitrogen or vacuum
	lift pins for contact or proximity baking
	heat-cool feature

Vacuum Chuck hot plates
 

Wenesco's hot vacuum chuck utilizes high uniformity heaters controlled with an accurate digital thermostat to assure even heating across the entire plate. The substrate is secured to the plate surface when air is suctioned out of the vacuum chuck. The temperature sensor, imbedded in the vacuum chuck, monitors and maintains the selected temperature, thus controlling the cure rate of fluid materials deposited on the substrate. A hot vacuum chuck system may also include provisions for cooling the substrate after hardening, by shutting down the heat and directing a cooling gas flow towards the emulsion. This process integrates both the hardening and cooling operations and improves product throughput. Other applications include probing, characterization, inspection and failure analysis of semiconductor wafers and chips, surface annealing, metal disposition, baking, and other material research. The standard sizes of hot vacuum chucks range from 15mm to 600mm . Temperature ranges for standard models are available to 537C, with higher temperature limits available for custom hot chucks.

Model HP66V hot plate with PV4 vacuum chuck	Model HP1212QPV3 hot plate, with four independent PV3  plate styles.  This feature is available with any plate style for chucks up to 24 x 24 in.
Model HP99V shown with optional pneumatic lift pins. The` pins can be actuated manually, or programmed using a time or temperature base.     Lift pins are further explained near the bottom of this page	VACUUM CHUCK HOT PLATES  These versatile heated chucks provide a means for a simple, yet  highly controllable heat process for processing substrates.   All models feature a remote digital thermostat, which may be placed up to 32 in. from the plate. Set point and current temperature are digitally displayed in C or F, and temperature is held constant within 1% of set point. This thermostat may be programmed in a wide range of ramp and soak profiles.  An optional com port allows you to communicate with the thermostat from your computer An on-off valve is furnished for your vacuum supply. Vacuum rings and port are easily enabled or disabled with recessed set screws.

Model	Plate size (in)	Overall size (in)	Vacuum rings	Plate surface. 005	Max temp (C)	power
HP66V	6 X 6	8 X 8 X 2 high	pv3 or pv4	aluminum	400	120/240
HP99V	9 x 9	11 x 11 x 2	pv3 or pv4	aluminum	400	120/240
HP1212V	12 x 12	14 x 14 x 2	select	aluminum	400	120/240
HP1818V	18 X 18	20 x 20 x 2	select	aluminum	400	120/240
HP2424V	24 X 24	26 x 26 x 2	select	aluminum	400	240
HP66HV	6 x 6	10 x 10 x 4	pv3 or pv4	stainless	537	120/240
HP99HV	9 x 9	13x 13 x 4	pv3 or pv4	Stainless 303	537	240
HP1212HV	12 x 12	16 x 16 x 4	select	Stainless 303	537	240
HP1818HV	18 x18	22 x 22 x 4	select	Stainless 303	537	240
HP2424HV	24 x 24	28 x 28 x 4	select	Stainless 303	537	240
Notes:  Heat rise: V models, approx 20C/minute. HV models approx 25C/minute.  Vacuum rings -- select from chart below or we will customize to your requirements.  Other voltages available

 

Plate style PV3

Plate style PV4

Plate style PV6

Standard vacuum ring patterns

Plate PV3 Dia in / mm	Plate PV4 Dia in /  mm	Plate PV6 Dia in /  mm
.75     (19.05)	.75     (19.05)	75     (19..05)
1.75   (44.45)	1.75   (44.45)	1.75   (44.45)
3.75   (95.25)	3.75   (95.25)	3.75   (95.25)
	5.75   (146.05)	5.75    (146.05)
		7.75    (196.85)
		11.65    (295.91)

         

Chucks with gas-tight hoods, for nitrogen

Model HP1212HV is shown with a gas tight hood, fitted with a high temperature glass window. This fully insulated hood is 4 in above the heated chuck. The vented base shown under the heated chuck housing contains a motorized lift pin assembly. Lift pin speed is controlled up and down.	Interior view of motorized lift pin assembly. This version is controlled with a computer.
	Temperature uniformity for model HP 1212V ZONE Zone size inches Set pt 100C Set pt 200C Set pt 300C Set pt 400C A 2.4 x 2.4 100 200 301 400 B 4.8 x 4.8 99 199 298 398 C 7.2 x 7.2 97 193 296 385 D 9.5 x 9.6 92 189 290 380 E 12 x 12 81 183 278 360
This model has a tall gas-tight hood with nitrogen gas entering from the top. Special perforated metal filters spread the nitrogen flow evenly over the work piece. Operations (Nitrogen flow on,off )( Heat on,off) (Hood up,down) , are controlled with a timer. The light tower displays activation of these functions.  The polished stainless steel plate is 24x24 inches, and  operates at 450C	Model HP66V, with nitrogen hood removed, is shown with style pv3 vacuum pattern. The plumbing delivers and retrieves coolant through tunnels machined in the chuck. Chuck temperature is reduced from 300C to room temperature in approximately 25-30 minutes.

                                       

Wenesco invites inquiries about customized hot plates in different sizes or with special temperature requirements and features.  Call or write us today about your unique needs.

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