
Vacuum Chuck hot plates
|
Our hot vacuum chuck utilizes high uniformity
heaters controlled with an accurate digital thermostat to assure
even heating across the entire plate. The substrate is secured
to the plate surface when air is suctioned out of the vacuum
chuck. The temperature sensor, imbedded in the vacuum chuck,
monitors and maintains the selected temperature, thus
controlling the cure rate of fluid materials deposited on the
substrate.
A hot vacuum chuck system may also include provisions for
cooling the substrate after hardening, by shutting down the heat
and directing a cooling gas flow towards the emulsion. This
process integrates both the hardening and cooling operations and
improves product throughput.
Other applications include probing, characterization, inspection
and failure analysis of semiconductor wafers and chips,
surface annealing, metal disposition, baking, and other
material research.
The standard sizes of hot vacuum chucks range from 15mm to 600mm
. Temperature ranges for standard models are available to 537C,
with higher temperature limits available for custom hot chucks.
|
|
 |
|
Model HP66V shown with PV1
plate |
| |
|
 |
Model HP1212QPV3 hot plate, with four
independent PV3 plate styles.
This feature is available with
any plate style for chucks up to 24 x 24 in.
|
VACUUM CHUCK HOT PLATES
|
These
versatile heated chucks provide a means for a simple, yet highly
controllable heat process for processing substrates.
All models feature a remote digital thermostat, which may be
placed up to 32 in. from the plate. Set point and current temperature
are digitally displayed in C or F, and temperature is held constant
within 1% of set point.
This thermostat may be programmed in a wide range of ramp and soak
profiles. An optional com port allows you to communicate with the
thermostat from your computer
An on-off valve is furnished for your vacuum supply. Vacuum rings and
port are easily enabled or disabled with recessed set screws.
|
|
|

|
Model
HP99V shown with optional pneumatic lift pins. The`
pins can be actuated manually, or programmed using a time or
temperature base.
Lift pins are further explained near the bottom of this page
|
TEMPERATURE RANGE 0-325C (617F)
(chucks
are anodized aluminum,.005” uniform surface)
Plates are available coated with silicon-ceramic
or teflon,
depending on operating temperature
|
Model |
Plate size |
Overall size |
Plate type |
Power |
|
HP66V |
6
X 6 IN |
8
x 8 x 2 in high |
pv1 or pv3 |
120 or 240V |
|
HP
99V |
9
X 9 IN |
11
x 11 x 2 in high |
pv4 |
120 or 240V |
|
HP1212V |
12
X12 IN |
14
x14 x 2 in high |
pv6 |
120 or 240V |
|
HP1818V |
18 X 18 IN |
20 X 20 X 2 in high |
pv6 |
120
or 240V |
TEMPERATURE RANGE 0-537C (1000F) (chucks are
303 stainless steel
-.005”uniform surface)
Temperature
rise 20C to 537C=25 sec (20.68C/sec)
|
Model |
Plate size |
Overall size |
Plate type |
Power |
|
HP66HV |
6
X 6 IN |
12
X 12 X 4 in high |
pv1 or pv3 |
240V |
|
HP99HV |
9
X 9 IN |
15
X 15 X 4 in high |
pv4 |
240V |
|
HP1212HV |
12
X 12 IN |
18
X 18 X 4 in high |
pv6 |
240V |
|
HP1818 HV |
18 X 18 IN |
20 X 20 X 4 in high |
pv6 |
240V |
|
 |

|
|
Plate style PV1 |
Plate style PV3 |
|
 |
 |
|
Plate style PV4 |
Plate style PV6 |
|
|
 |
|
PV6 groove detail |
|
Vacuum |
Plate PV1
Dia in / mm |
Plate PV3
Dia in / mm |
Plate PV4
Dia in / mm |
Plate PV6
Dia in / mm
|
|
Orfice |
.125 (3.18) |
.125
(3.18) |
.125 (3.18) |
.125 (3.18) |
|
Ring |
. |
.75 (19.05) |
.75 (19.05) |
75
(19..05) |
|
Ring |
|
1.75 (44.45) |
1.75 (44.45) |
1.75 (44.45) |
|
Ring |
|
3.75 (95.25) |
3.75 (95.25) |
3.75 (95.25) |
|
Ring |
|
|
5.75 (146.05) |
5.75
(146.05) |
|
Ring |
|
|
|
7.75
(196.85) |
|
Ring |
|
|
|
11.65 (295.91) |
VACUUM CHUCKS WITH NITROGEN HOOD
|
 |
|
Model HP1212HNV shown
with hood. Note the valves for directing the nitrogen in and out from
under the hood. The third valve is used to supply vacuum to the plates. |
|

|
|
Model
HP1212HNV shown with PV6 style plate and new dual section hood.
The 2 sections of the hood consists of an insulated light
weight lid and insulated side walls. If required, the side walls
may be connected to the lid and used as a one piece hood
The
opaque insulated lid may be replaced with a transparent glass
version. |
|
|
 |
|
Model HP1212HNV shown
without hood |
TEMPERATURE RANGE
0-537C (1000F)
Chucks are
stainless steel,
.005" uniform surface.
|
Model |
Plate size |
Overall size |
Plate
style |
Power |
|
HP66HNV |
6 X 6 IN |
14X 14 X
10 in
high |
pv1 or pv4 |
240V |
|
HP99HNV
|
9 X 9 IN |
25 X 25 X 10 in high |
pv4" |
240V |
|
HP1212HNV |
12 X 12 IN |
25 X 25 X
10 in
high |
pv6 |
240V |
|
HP1818 HNV |
18 X 18 IN |
20 X 20 X 4 in
high |
pv6 |
240V |
|
Uniformity grid: Models
HP1212V,
HP1212HV, HP1212HNV |
|

|
Symbol |
Temperature HP1212V
|
|
Temperature
HP1212HV
|
Temperature
HP1212HNV
|
Inches
from
center |
|
● |
502F (261C) |
|
1004F(539C) |
1004F(539C) |
0 |
|
○ |
500F (260C) |
|
1002F(538C) |
1002F(538C) |
.375
(9.5mm) |
|
□ |
498F (259C) |
|
1000F(537C) |
1000F(537C) |
.875
(22.2mm) |
|
∆ |
496F (258C) |
|
996F(535C) |
996F(535C) |
1.875
(47.62mm) |
|
 |
493F (256C) |
|
989F(531C) |
992F(532.6C) |
2.875
(73mm) |
|
 |
490F (254C) |
|
982F(527C) |
989F(531C) |
3.875
(98.5mm) |
|
 |
487F (253C) |
|
973F(522C) |
982F(527C) |
5.825
(148mm) |
|
|
|
|

|
|
Model
HP1212HNV shown with your bell jar mounted on our platform.
Note inert gas enters and exits the bell jar thru the valves in
the platforms. The thermocouple, vacuum, and power connections are
also furnished with the platform. These features negate the need
for additional feed thru hardware for the bell jar. |

|
|
Model
HP1212HNV is shown with our optional lift pin
mechanism, which raises the substrate up to .500 inch above the
hot chuck. The pneumatic lift pin assembly is operated with a
manually operated air valve, which operates a small compressed air
cylinder. The lift pins are usually .125 inch diameter, and the
pin location pattern may be specified.
A typical pattern is 4 pins,
90 degrees apart, 3 x
3 inch
square.
|
We also have
designed and built variations of these hot plates, which
include a “rapid cool” feature, whereby cold nitrogen may be
introduced into channels in the chuck, decreasing the chuck
temperature to room temperature in 10-20 minutes.
|
|
Wenesco
invites inquiries about customized hot plates in different sizes
or with special temperature requirements and features. Call or
write us today about your unique needs. |
|
TOP |
|